Electron Probe X-ray Microanalyzer (EPMA)

Keywords: EPMA, Area analysis, Line analysis, Damage investigation, Elemental mapping

An EPMA is an effective instrument for surface observation, elemental analysis and measuring the elemental distribution of a variety of materials, including metals, minerals, and others. Measuring the elemental distribution enables visualization of differences in the elements present around the region of observation. The shape around the region can also be obtained with an electron microscope.
An EPMA is used for damage investigation of materials, observation and analysis of foreign substances and other applications.

Major Specifications

• Specimens: Metals, minerals, electronic devices, glass, etc.
• Max. specimen size: 60 x 60 x 15 mm (LxWxT)
  Samples are pretreated, if necessary.
• Modes of analysis: Composition image, qualitative and quantitative analysis,
  line analysis, area analysis (elemental mapping), etc.
• Magnification: 1 to 100,000 times
  This instrument has higher resolution than an energy dispersive spectrometer (EDS). Light elements such as B, C, N and O can be detected, which cannot be adequately detected with an EDS.

Specimen surface image	Qualitative analysis

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