CVD Coating Equipment

Keywords: CVD, SiC, Carbon, Ceramic composite materials

IIC has CVD coating equipment for forming ceramic composites by CVD coating of carbon and SiC. We conduct manufacturing trials of advanced composites containing continuous fibers and by coating carbon and SiC on base materials. CVD: Chemical Vapor Deposition

SPECIFICATIONS

• Small CVI furnace: one
  Reactor: 270 dia.×400 mm H、regular use (270 dia. ×250 mm H)
  Processing temperature: 1000°C~
• Large CVI furnace: one
  Reactor: 650 dia.×1300 mm H、regular use (600 dia.×800 mm H)
  Processing temperature: 1000°C~

EXAMPLES

SiC coating on a carbon substrate （thickness: 30 μｍ）

SiC coating on a SiC fiber （thickness: 3 μｍ）